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Sputtering target is installed on the vacuum deposition machine for coating. It can be plated with conductive film, insulating film, decorative film, superhard film, lubricating film, magnetic film and other functional films. It is a material used to manufacture thin films using sputtering deposition or thin film deposition technology. In this process, the sputtering target material starts as a solid, which is decomposed into tiny particles by gas ions, forming a spray and covering another material.
Type | Material | Purity |
Metal target | W, Mo, Zr, Ta, Nb, Ni, Ti, Cr, Al, Cu, Si, Hf | 2N5-5N 99.5%-99.999% |
Alloy target | Ti-Al (50: 50at%, 80: 20at%, 70: 30at%, 60: 40at%33: 67at%) , Si-Al (90: 10wt%, 70: 30wt%, 50: 50wt%) Cr-Al (30: 70at%, 50: 50at%, 70: 30at%） Cr-Si (50: 50wt%) W-Ti (90: 10wt%) Ni-Cr (80: 20wt%) Ti-Zr, Ti-Si, Ti-Nb, Nb-Zr, Nb-W-Zr, Ti-Al-Si | >99.9% |
Shape | General size | drawing |
Disc/Multi arc | diameter60/65/95/100*30/32/40/45mm | Other sizes can be customized |
Flat/planar | Wide max 300mm, length max3000mm | |
Rotary/tubular | OD70 x Wt7 x L mm OD80 x Wt8 x L mm OD127 x ID105 x L mm OD146 x ID136 x L mm OD219 x ID194 x L mm OD300 x ID155 x L mm |
Architectural glass, car using glass, graphic display field
Electronic and semiconductor field
Decoration and mould field
Optics coating materials
Solar photovoltaic industry
Wear resistant coating
Powder metallurgy(HIP)
Melting processing(Melting,forging,drilling,machining)
Thermal spraying
Target bonding
Emission Spectroscopy
Direct-coupled plasma spectrometry
Atomic absorption spectrometry
Scanning electron microscopy
X-ray diffraction
No.26 Baotai Road, Weibin District, Baoji City, Shaanxi, China.
No.26 Baotai Road, Weibin District, Baoji City, Shaanxi, China.
